Concept information
Preferred term
atomikerroskasvatus
Type
-
YSO-käsite
Broader concept
Entry terms
- ALD-menetelmä
- ALD-tekniikka
Belongs to group
In other languages
-
atomic layer deposition
English
-
atomlagerdeposition
Swedish
-
ALD-metoden
-
ALD-teknik
URI
http://www.yso.fi/onto/yso/p27468
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